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材料工程  2017, Vol. 45 Issue (2): 1-6    DOI: 10.11868/j.issn.1001-4381.2016.000792
  研究论文 本期目录 | 过刊浏览 | 高级检索 |
金刚石自支撑膜的高温红外透过性能
黑立富1, 闫雄伯1, 朱瑞华1, 陈良贤1, 刘金龙1, 魏俊俊1, 廉伟艳2, 张荣实2, 李成明1
1 北京科技大学 新材料技术研究院, 北京 100083;
2 天津津航物理技术研究所, 天津 300308
High-temperature Infrared Transmission of Free-standing Diamond Films
HEI Li-fu1, YAN Xiong-bo1, ZHU Rui-hua1, CHEN Liang-xian1, LIU Jin-long1, WEI Jun-jun1, LIAN Wei-yan2, ZHANG Rong-shi2, LI Cheng-ming1
1 Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China;
2 Tianjin Jinhang Institute of Technical Physics, Tianjin 300308, China
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摘要 由于金刚石具有低吸收和优异的力学与导热性能使其成为长波(8~12μm)红外光学窗口材料的重要选择。对于许多极端条件的应用,化学气相沉积(CVD)金刚石自支撑膜的高温光学性质至关重要。应用直流电弧等离子喷射法制备光学级金刚石自支撑膜进行变化温度的红外光学透过性能研究,采用光学显微镜、X射线衍射、激光拉曼和傅里叶变换红外-拉曼光谱仪检测CVD金刚石膜的表面形貌、结构特征和红外光学性能。结果表明:在27℃时金刚石膜长波红外8~12μm之间的平均透过率达到65.95%,在500℃时8~12μm处的平均透过率为52.5%。透过率下降可分为3个阶段。对应于透过率随温度的下降,金刚石膜的吸收系数随温度的升高而增加。金刚石自支撑膜表面状态的变化,对金刚石膜光学性能的影响显著大于内部结构的影响。
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黑立富
闫雄伯
朱瑞华
陈良贤
刘金龙
魏俊俊
廉伟艳
张荣实
李成明
关键词 直流电弧等离子喷射金刚石自支撑膜高温红外透过    
Abstract:The combination of low absorption and extreme mechanical and thermal properties make diamond a compelling choice for some more extreme far infrared (8-12 μm) window applications. The optical properties of CVD diamond at elevated temperatures are critical to many of these extreme applications. The infrared transmission of free-standing diamond films prepared by DC arc plasma jet were studied at temperature varied conditions. The surface morphology, structure feature and infrared optical properties of diamond films were tested by optical microscope, X-ray diffraction, laser Raman and Fourier-transform infrared spectroscopy. The results show that the average transmittance for 8-12μm is decreased from 65.95% at 27℃ to 52.5% at 500℃,and the transmittance drop is in three stages. Corresponding to the drop of transmittance with the temperature, diamond film absorption coefficient increases with the rise of temperature. The influence of the change of surface state of diamond films on the optical properties of diamond films is significantly greater than the influence on the internal structure.
Key wordsDC arc plasma jet    free-standing diamond film    high-temperature infrared transmission
收稿日期: 2016-06-30      出版日期: 2017-02-23
中图分类号:  O657.37  
通讯作者: 李成明(1962-),男,教授,博士生导师,主要从事金刚石薄膜研究,联系地址:北京市海淀区学院路30号北京科技大学新材料技术研究院(100083),chengmli@mater.ustb.edu.cn     E-mail: chengmli@mater.ustb.edu.cn
引用本文:   
黑立富, 闫雄伯, 朱瑞华, 陈良贤, 刘金龙, 魏俊俊, 廉伟艳, 张荣实, 李成明. 金刚石自支撑膜的高温红外透过性能[J]. 材料工程, 2017, 45(2): 1-6.
HEI Li-fu, YAN Xiong-bo, ZHU Rui-hua, CHEN Liang-xian, LIU Jin-long, WEI Jun-jun, LIAN Wei-yan, ZHANG Rong-shi, LI Cheng-ming. High-temperature Infrared Transmission of Free-standing Diamond Films. Journal of Materials Engineering, 2017, 45(2): 1-6.
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http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2016.000792      或      http://jme.biam.ac.cn/CN/Y2017/V45/I2/1
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