@article{喻利花_35, author = {[喻利花, 苑彩云, 许俊华]}, title = {磁控溅射NbSiN复合膜的微结构和性能}, publisher = {材料工程}, year = {2013}, journal = {材料工程}, volume = {0}, number = {7}, eid = {35}, pages = {35-39}, keywords = {

NbSiN;磁控溅射;微结构;力学性能;摩擦磨损性能

}, doi = https://jme.biam.ac.cn/CN/10.3969/j.issn.1001-4381.2013.07.007 }