@article{纪锡旺_43, author = {[纪锡旺, 许振华, 贺莉丽, 何利民, 郝俊文, 甄洪滨]}, title = {基体负偏压对类金刚石涂层结构和性能的影响}, publisher = {材料工程}, year = {2015}, journal = {材料工程}, volume = {43}, number = {8}, eid = {43}, pages = {43-49}, keywords = {;DC-PECVD;类金刚石;基体负偏压;结构;性能}, doi = https://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2015.08.008 }