Microstructures and Mechanical Properties of Magnetron Sputtered NbSiN Composite Films

YU Li-hua, YUAN Cai-yun, XU Jun-hua

Journal of Materials Engineering ›› 2013, Vol. 0 ›› Issue (7) : 35-39.

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Journal of Materials Engineering ›› 2013, Vol. 0 ›› Issue (7) : 35-39. DOI: 10.3969/j.issn.1001-4381.2013.07.007

Microstructures and Mechanical Properties of Magnetron Sputtered NbSiN Composite Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 0(7): 35-39 https://doi.org/10.3969/j.issn.1001-4381.2013.07.007

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