CVD法与PCVD法TiN薄膜研究
刘齐成, 刘培英, 陶冶, 刘利
Investigation on TiN Coating by CVD and Pulsed D. C. PCVD methods
LIU Qi-cheng, LIU Pei-ying, TAO Ye, LIU Li
材料工程 . 2000, (12): 22 -25 .