溶胶-凝胶法制作PZT微驱动器的研究

邱成军, 刘红梅, 张辉军, 赵全亮, 孟丽娜, 曹茂盛

Research of Microactuator with PZT Prepared by Sol-gel

QIU Cheng-jun, LIU Hong-mei, ZHANG Hui-jun, ZHAO Quan-liang, MENG Li-na, CAO Mao-sheng

材料工程 . 2007, (8): 24 -27 .