Effect of power on microstructure and properties of Si-DLC films fabricated by pulsed direct current magnetron sputtering

WANG Shaohui, CHAI Liqiang, HU Yong, WANG Peng, LI Yong

Journal of Materials Engineering ›› 2026, Vol. 54 ›› Issue (10) : 231-240.

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Journal of Materials Engineering ›› 2026, Vol. 54 ›› Issue (10) : 231-240. DOI: 10.11868/j.issn.1001-4381.2024.000539

Effect of power on microstructure and properties of Si-DLC films fabricated by pulsed direct current magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 54(10): 231-240 https://doi.org/10.11868/j.issn.1001-4381.2024.000539

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