Plasma CVD Technology and Its Application

Liu Yi

Journal of Materials Engineering ›› 1990, Vol. 0 ›› Issue (5) : 36-38.

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PDF(285 KB)
Journal of Materials Engineering ›› 1990, Vol. 0 ›› Issue (5) : 36-38.

Plasma CVD Technology and Its Application

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1990, 0(5): 36-38

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