Influence of Magnetic Field and N2 Partial Pressure on TiN coating of Ion Plating with Multi-Arc Source

Zhou Xiying, Fu Zhiqiang, Wan Rengeng, Chen Kaixuan

Journal of Materials Engineering ›› 1993, Vol. 0 ›› Issue (12) : 35-37.

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PDF(381 KB)
Journal of Materials Engineering ›› 1993, Vol. 0 ›› Issue (12) : 35-37.

Influence of Magnetic Field and N2 Partial Pressure on TiN coating of Ion Plating with Multi-Arc Source

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1993, 0(12): 35-37

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