Studies on Fe Thin Film by RF Magnetron Sputtering

Xia Yang, Yu Guanghua, Zhu Fengwu, Xiao Jimei, Fang Guangdan, Song Qingshan, Xiong Xinen

Journal of Materials Engineering ›› 1998, Vol. 0 ›› Issue (5) : 31-33.

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PDF(124 KB)
Journal of Materials Engineering ›› 1998, Vol. 0 ›› Issue (5) : 31-33.

Studies on Fe Thin Film by RF Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1998, 0(5): 31-33

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