Research on Synthesis of Taltanlum Nitride Film and Its Structure

Leng Yongxiang, Huang Nan, Yang Ping

Journal of Materials Engineering ›› 1998, Vol. 0 ›› Issue (9) : 18-20,27.

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Journal of Materials Engineering ›› 1998, Vol. 0 ›› Issue (9) : 18-20,27.

Research on Synthesis of Taltanlum Nitride Film and Its Structure

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1998, 0(9): 18-20,27

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