Study on the Methods to Improve the Propertiesof Sputtering Deposited MoS2 Films

ZHANG Xiao-ling, HU Nai-sai, HE Jia-wen

Journal of Materials Engineering ›› 1999, Vol. 0 ›› Issue (10) : 44-47.

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Journal of Materials Engineering ›› 1999, Vol. 0 ›› Issue (10) : 44-47.

Study on the Methods to Improve the Propertiesof Sputtering Deposited MoS2 Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1999, 0(10): 44-47

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