A Study of TiN/AlN Nano Multilayers

LI Ge-yang, SHI Xiao-rong, WU Liang, XU Jun-hua, RONG Yong-hua, ZHANG Hui-juan

Journal of Materials Engineering ›› 1999, Vol. 0 ›› Issue (11) : 6-9,13.

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Journal of Materials Engineering ›› 1999, Vol. 0 ›› Issue (11) : 6-9,13.

A Study of TiN/AlN Nano Multilayers

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1999, 0(11): 6-9,13

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