The Analysis of Specialities of GexC1-x Films Prepared by RF Magnetron Reactive Sputtering

SONG Jian-quan, LIU Zheng-tang, YU Zhong-qi, GENG Dong-sheng, ZHENG Xiu-lin

Journal of Materials Engineering ›› 2000, Vol. 0 ›› Issue (10) : 15-17,21.

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PDF(189 KB)
Journal of Materials Engineering ›› 2000, Vol. 0 ›› Issue (10) : 15-17,21.

The Analysis of Specialities of GexC1-x Films Prepared by RF Magnetron Reactive Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 0(10): 15-17,21

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