Investigation on TiN Coating by CVD and Pulsed D. C. PCVD methods

LIU Qi-cheng, LIU Pei-ying, TAO Ye, LIU Li

Journal of Materials Engineering ›› 2000, Vol. 0 ›› Issue (12) : 22-25.

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Journal of Materials Engineering ›› 2000, Vol. 0 ›› Issue (12) : 22-25.

Investigation on TiN Coating by CVD and Pulsed D. C. PCVD methods

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 0(12): 22-25

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