Study of the Relationship between Temperature Field and Diamond Film Growth in Hot-filament CVD Reactors

QI Xue-gui, CHEN Ze-shao, WANG Guan-zhong

Journal of Materials Engineering ›› 2001, Vol. 0 ›› Issue (11) : 31-34,16.

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PDF(258 KB)
Journal of Materials Engineering ›› 2001, Vol. 0 ›› Issue (11) : 31-34,16.

Study of the Relationship between Temperature Field and Diamond Film Growth in Hot-filament CVD Reactors

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2001, 0(11): 31-34,16

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