Development of PZT Films in MEMS Device

LIU Hong-mei, QIU Cheng-jun, CAO Mao-sheng

Journal of Materials Engineering ›› 2004, Vol. 0 ›› Issue (6) : 37-40.

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Journal of Materials Engineering ›› 2004, Vol. 0 ›› Issue (6) : 37-40.

Development of PZT Films in MEMS Device

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2004, 0(6): 37-40

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