Preparation and Properties of Si3N4 Films on Sapphire and Si Substrates

SONG Wenyan, CUI Hu, SU Xunjia, LIU Zhengtang

Journal of Materials Engineering ›› 2006, Vol. 0 ›› Issue (2) : 38-40.

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Journal of Materials Engineering ›› 2006, Vol. 0 ›› Issue (2) : 38-40.

Preparation and Properties of Si3N4 Films on Sapphire and Si Substrates

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 0(2): 38-40

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