Structure Characterization and Preparation of Carbon Nitride Film Using Magnetron Sputtering

WANG Ji-gang, LI Hong, ZHANG Xu-hai, LI Fan, JIANG Jian-qing

Journal of Materials Engineering ›› 2006, Vol. 0 ›› Issue (7) : 11-13,18.

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Journal of Materials Engineering ›› 2006, Vol. 0 ›› Issue (7) : 11-13,18.

Structure Characterization and Preparation of Carbon Nitride Film Using Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 0(7): 11-13,18

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