Effects of Radio Frequency Power on Mechanical Properties and Wear Resistance of Chromium Oxide Thin Films

LUO Fei, PANG Xiao-lu, GAO Ke-wei, YANG Hui-sheng, WANG Yan-bin

Journal of Materials Engineering ›› 2007, Vol. 0 ›› Issue (1) : 25-28.

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PDF(684 KB)
Journal of Materials Engineering ›› 2007, Vol. 0 ›› Issue (1) : 25-28.

Effects of Radio Frequency Power on Mechanical Properties and Wear Resistance of Chromium Oxide Thin Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 0(1): 25-28

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