Optical Property of ZnO Films Grown on Si Substrate by Plasma Enhanced Chemical Vapor Deposition

WANG Ying-min, DU Nan, CAI Li, LI He, CHENG Guo-an

Journal of Materials Engineering ›› 2007, Vol. 0 ›› Issue (11) : 71-75.

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Journal of Materials Engineering ›› 2007, Vol. 0 ›› Issue (11) : 71-75.

Optical Property of ZnO Films Grown on Si Substrate by Plasma Enhanced Chemical Vapor Deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 0(11): 71-75

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