Study on Growth Process of Amorphous Carbon Nitride Film

WANG Ji-gang, LI Hong, ZHANG Xu-hai, LI Fan, JIANG Jian-qing

Journal of Materials Engineering ›› 2007, Vol. 0 ›› Issue (4) : 39-42,46.

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Journal of Materials Engineering ›› 2007, Vol. 0 ›› Issue (4) : 39-42,46.

Study on Growth Process of Amorphous Carbon Nitride Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 0(4): 39-42,46

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