Application of Ultraviolet Treatment on Synthesis of Pure-silica Zeolite Low Dielectric Constant Thin Films

YUAN Hao, XIE Li-li, TIAN Zhen, WANG Li-jun

Journal of Materials Engineering ›› 2008, Vol. 0 ›› Issue (10) : 110-113.

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PDF(437 KB)
Journal of Materials Engineering ›› 2008, Vol. 0 ›› Issue (10) : 110-113.

Application of Ultraviolet Treatment on Synthesis of Pure-silica Zeolite Low Dielectric Constant Thin Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2008, 0(10): 110-113

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