PDF(1084 KB)
Microfabrication Silicon Tips in Iodine-supersaturated KOH Solution
HAN Jian-qiang, LU Shao-yong, LI Qing, WANG Jiang-ying
Journal of Materials Engineering ›› 2008, Vol. 0 ›› Issue (10) : 92-94,97.
PDF(1084 KB)
PDF(1084 KB)
Microfabrication Silicon Tips in Iodine-supersaturated KOH Solution
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