Study on Performance of Porous Silicon Used in Thermal Isolation Layer of Micro Thermal Sensor

LI Chang-qing, HU Ming, YANG Hai-bo

Journal of Materials Engineering ›› 2008, Vol. 0 ›› Issue (8) : 9-12.

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Journal of Materials Engineering ›› 2008, Vol. 0 ›› Issue (8) : 9-12.

Study on Performance of Porous Silicon Used in Thermal Isolation Layer of Micro Thermal Sensor

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2008, 0(8): 9-12

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