Study on Fabrication of Porous Silicon Gas Sensor and Gas Sensing-characteristics

LI Dong-hai, HU Ming, SUN Feng-yun, CHEN Peng, SUN Peng

Journal of Materials Engineering ›› 2009, Vol. 0 ›› Issue (4) : 71-74.

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PDF(1095 KB)
Journal of Materials Engineering ›› 2009, Vol. 0 ›› Issue (4) : 71-74.

Study on Fabrication of Porous Silicon Gas Sensor and Gas Sensing-characteristics

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 0(4): 71-74

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