Study on Fabrication of Porous Silicon Gas Sensor and Gas Sensing-characteristics
LI Dong-hai, HU Ming, SUN Feng-yun, CHEN Peng, SUN Peng
Journal of Materials Engineering ›› 2009, Vol. 0 ›› Issue (4) : 71-74.
Study on Fabrication of Porous Silicon Gas Sensor and Gas Sensing-characteristics
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