Effect of Beam Density of Electron Beam on Phosphorus Impurity in Metallurgical Grade Silicon

JIANG Da-chuan, TAN Yi, DONG Wei, WANG Qiang, PENG Xu, LI Guo-bin

Journal of Materials Engineering ›› 2010, Vol. 0 ›› Issue (3) : 18-21.

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Journal of Materials Engineering ›› 2010, Vol. 0 ›› Issue (3) : 18-21.

Effect of Beam Density of Electron Beam on Phosphorus Impurity in Metallurgical Grade Silicon

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 0(3): 18-21

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