TiN/NbN Multilayers Prepared by Asymmetrical Bipolarpulsed Reactive Magnetron Sputtering

HEI Li-fu, XU Jun-bo, CHEN Liang-xian, LI Cheng-ming, LU Fan-xiu

Journal of Materials Engineering ›› 2012, Vol. 0 ›› Issue (7) : 92-96.

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Journal of Materials Engineering ›› 2012, Vol. 0 ›› Issue (7) : 92-96.

TiN/NbN Multilayers Prepared by Asymmetrical Bipolarpulsed Reactive Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 0(7): 92-96

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