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材料工程  2014, Vol. 0 Issue (12): 23-27    DOI: 10.11868/j.issn.1001-4381.2014.12.004
  材料与工艺 本期目录 | 过刊浏览 | 高级检索 |
不同Ti含量的W-Ti-N复合膜的微结构及性能研究
赵淑芳, 喻利花, 马冰洋, 许俊华
江苏科技大学 先进焊接技术江苏省重点实验室, 江苏 镇江 212003
Study on Microstructure and Properties of W-Ti-N Composite Films with Different Titanium Content
ZHAO Shu-fang, YU Li-hua, MA Bing-yang, XU Jun-hua
Jiangsu Key Laboratory of Advanced Welding Technology, Jiangsu University of Science and Technology, Zhenjiang 212003, Jiangsu, China
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摘要 采用多靶反应磁控溅射技术制备一系列不同Ti含量的W-Ti-N复合膜.采用X射线衍射仪、扫描电镜、纳米压痕仪等检测方法对薄膜的微结构和力学性能进行表征.采用UMT-2功能摩擦试验机,在室温、大气环境、无润滑的条件下对W-Ti-N复合膜的摩擦性能进行评价, 同时,探讨薄膜的致硬机理和摩擦机制.结果表明:Ti含量(原子分数,下同)为5%~23.48%时,薄膜硬度处于峰值区,硬度值最高可达39GPa,摩擦因数在0.4左右.当Ti含量高于23.48%时,硬度随着Ti含量增加而下降,摩擦因数随Ti含量的增加而升高.
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赵淑芳
喻利花
马冰洋
许俊华
关键词 磁控溅射W-Ti-N复合膜微结构力学性能摩擦性能    
Abstract:W-Ti-N composite films with different titanium content were fabricated by reactive magnetron sputtering technique. The microstructure and mechanical properties of films were characterized by XRD,SEM and CSM. Tribological performance of the films was tested on UMT-2 multifunctional tribometer in the condition of room temperature,atmosphere environment and without lubrication. At the same time, the mechanisms of hardness enhancement and friction were also discussed. The results show that, at titanium content (atom fraction) of 5%-23.48%, the hardness of the film is in the peak area,and the maximums hardness is up to 39GPa,friction coefficient is about 0.4. When the Ti content is higher than 23.48%, the hardness decreases with increasing of the titanium content. In addition, the friction coefficient increases.
Key wordsmagnetron sputtering    W-Ti-N composite film    microstructure    mechanical property    tribological property
收稿日期: 2012-08-14      出版日期: 2014-12-20
中图分类号:  TG174.44  
基金资助:国家自然科学基金资助项目(51074080);江苏省自然科学基金资助项目(BK2008240)
通讯作者: 许俊华(1962-),男,教授,研究方向:主要从事纳米科学与技术、薄膜材料物理和化学以及薄膜磁性材料等领域的研究工作,联系地址:江苏省镇江市京口区梦溪路2号江苏科技大学材料学院(212003)     E-mail: jhxu@just.edu.cn
引用本文:   
赵淑芳, 喻利花, 马冰洋, 许俊华. 不同Ti含量的W-Ti-N复合膜的微结构及性能研究[J]. 材料工程, 2014, 0(12): 23-27.
ZHAO Shu-fang, YU Li-hua, MA Bing-yang, XU Jun-hua. Study on Microstructure and Properties of W-Ti-N Composite Films with Different Titanium Content. Journal of Materials Engineering, 2014, 0(12): 23-27.
链接本文:  
http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2014.12.004      或      http://jme.biam.ac.cn/CN/Y2014/V0/I12/23
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