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材料工程  2018, Vol. 46 Issue (6): 51-56    DOI: 10.11868/j.issn.1001-4381.2016.000915
  研究论文 本期目录 | 过刊浏览 | 高级检索 |
共掺浓度对Na-Al共掺杂ZnO薄膜微观结构和光电性能的影响
陈义川, 胡跃辉, 胡克艳, 张效华, 童帆, 帅伟强, 劳子轩
景德镇陶瓷大学 机械电子工程学院, 江西 景德镇 333403
Effect of Co-doped Concentration on Microstructure and Photoelectric Properties of Na-Al Co-doped ZnO Thin Films
CHEN Yi-chuan, HU Yue-hui, HU Ke-yan, ZHANG Xiao-hua, TONG Fan, SHUAI Wei-qiang, LAO Zi-xuan
School of Mechanical and Electrical Engineering, Jingdezhen Ceramic Institute, Jingdezhen 333403, Jiangxi, China
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摘要 在石英玻璃衬底上,通过溶胶-凝胶旋涂法制备得到钠铝(Na-Al)共掺氧化锌(ZnO)薄膜(NAZO)。研究不同Na-Al共掺杂浓度对ZnO薄膜的结晶性、微观结构、光电性能的影响。结果表明:所有NAZO薄膜样品都沿c轴择优取向生长;适当的Na-Al共掺浓度,可以提高ZnO薄膜结晶性,提高薄膜的载流子迁移率;同时还可以观察到NAZO薄膜表面生长出六角柱状结构晶粒。随着Na-Al元素掺杂浓度的改变,所获薄膜的最高平均光学透过率达到95%。由于元素间固溶比的不同,适当的浓度可以提高Na-Al元素的掺杂效率和薄膜内部的载流子浓度,降低薄膜电阻率,NAZO薄膜最低电阻率为4.7×10-2Ω·cm。
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陈义川
胡跃辉
胡克艳
张效华
童帆
帅伟强
劳子轩
关键词 ZnO溶胶-凝胶Na-Al共掺杂微观结构光学性能    
Abstract:Sodium and aluminum (Na-Al) co-doped ZnO thin films (NAZO) were prepared on the quartz glass substrate by sol-gel spin-coating method. The effect of different Na-Al co-doped concentration on crystallization, microstructure and photoelectric properties of ZnO films were investigated. The results show that all NAZO thin films samples grow along the c-axis of the preferred orientation; appropriate Na-Al co-doped concentration can improve the ZnO films crystallization, increase the carrier mobility; meanwhile, six columnar grain structure crystal particles can be observed on the NAZO films surface. With the changing of Na-Al co-doped concentration, the highest mean optical transmittance reaches 95%. Because of the difference of the solid solution ratio, the appropriate concentration can improve the efficiency of doping Na-Al element, which enhances the carrier concentration of the film inside and the resistivity decreases; the lowest resistivity of NAZO thin films is 4.7×10-2Ω·cm.
Key wordsZnO    sol-gel    Na-Al co-doped    microstructure    optical property
收稿日期: 2016-07-27      出版日期: 2018-06-14
中图分类号:  O472  
通讯作者: 胡跃辉(1966-),男,教授,博士,主要从事半导体材料及器件方面的研究工作,联系地址:江西省景德镇市景德镇陶瓷学院湘湖校区机电学院(333403),E-mail:8489023@163.com     E-mail: 8489023@163.com
引用本文:   
陈义川, 胡跃辉, 胡克艳, 张效华, 童帆, 帅伟强, 劳子轩. 共掺浓度对Na-Al共掺杂ZnO薄膜微观结构和光电性能的影响[J]. 材料工程, 2018, 46(6): 51-56.
CHEN Yi-chuan, HU Yue-hui, HU Ke-yan, ZHANG Xiao-hua, TONG Fan, SHUAI Wei-qiang, LAO Zi-xuan. Effect of Co-doped Concentration on Microstructure and Photoelectric Properties of Na-Al Co-doped ZnO Thin Films. Journal of Materials Engineering, 2018, 46(6): 51-56.
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http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2016.000915      或      http://jme.biam.ac.cn/CN/Y2018/V46/I6/51
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