Abstract：Polysilicon is one of the important semiconductor materials and widely used in modern electronic industry,particularly it is used to manufacture the components of control device in electronic brain.Its properties,usage and the manufacturing process are described in detail.
赵建新. 多晶硅的性能及应用[J]. 材料工程, 1989, 0(1): 20-22.
Zhao Jianxin. Properties and Application of Polysilicon. Journal of Materials Engineering, 1989, 0(1): 20-22.