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材料工程  2007, Vol. 0 Issue (12): 39-43,47    
  表面工程 本期目录 | 过刊浏览 | 高级检索 |
MoS2/Zr复合薄膜的制备及性能研究
宋文龙, 邓建新, 张辉
山东大学, 机械工程学院, 济南, 250061
Preparation of MoS2/Zr Composite Coating and Its Performance
SONG Wen-long, DENG Jian-xin, ZHANG Hui
Department of Mechanical Engineering, Shandong University, Jinan 250061, China
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摘要 采用新型中频磁控溅射技术及多弧离子镀相结合的复合镀膜工艺,在硬质合金YT14基体上制备了MoS2/Zr复合薄膜。采用扫描电子显微镜(SEM)考察MoS2/Zr复合薄膜表面及截面的形貌,利用能谱分析(EDX)薄膜的成分组成。测试涂层的厚度、显微硬度及涂层与基体之间的结合力等性能参数。结果表明:制备的MoS2/Zr复合薄膜结构致密,结合力约为60N,厚度约为2.6μm,硬度约为HV800。
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宋文龙
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张辉
关键词 涂层刀具MoS2软涂层中频磁控溅射MoS2/Zr复合薄膜    
Abstract:The complex deposited process which fitted medium-frequency magnetron sputtering together with multi-arc ion plating,was utilized to prepare the MoS2 /Zr composite coating on the surface of cemented carbides YT14.SEM was adopted to observe and analyze the surface and cross-section morphologies of composite film.EDX was used to analyze the surface and cross-section component of the composite film.The thickness and hardness and adhesion strength of coating film were tested.The results show that the structure of MoS2 /Zr composite film is dense,the adhesion strength is about 60 N,the thickness is about 2.6μm,and the hardness is about HV800.
Key wordscoated tool    MoS2 soft coating    medium-frequency magnetron sputtering    MoS2 /Zr composite coating
收稿日期: 2007-05-13      出版日期: 2007-12-20
中图分类号:  TB383  
基金资助:国家自然科学基金资助项目(50475133,50675120);新世纪优秀人才支持计划资助项目(NCET-04-0622)
作者简介: 宋文龙(1981- ),男,博士研究生,主要从事刀具表面涂层技术及其性能研究,联系地址:山东省济南市经十路73号山东大学(南区)机械工程学院2007博(250061).E-mail:wlsong@mail.sdu.edu.cn
引用本文:   
宋文龙, 邓建新, 张辉. MoS2/Zr复合薄膜的制备及性能研究[J]. 材料工程, 2007, 0(12): 39-43,47.
SONG Wen-long, DENG Jian-xin, ZHANG Hui. Preparation of MoS2/Zr Composite Coating and Its Performance. Journal of Materials Engineering, 2007, 0(12): 39-43,47.
链接本文:  
http://jme.biam.ac.cn/CN/      或      http://jme.biam.ac.cn/CN/Y2007/V0/I12/39
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