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材料工程  2017, Vol. 45 Issue (3): 119-128    DOI: 10.11868/j.issn.1001-4381.2015.000229
  综述 本期目录 | 过刊浏览 | 高级检索 |
类金刚石膜研究进展
陈青云1,2, 施凯敏2, 苏敏华2, 吕会议1, 罗瑜1, 曾陈1
1. 西南科技大学 核废物与环境安全国防重点学科实验室, 四川 绵阳 621010;
2. 香港大学 工学院土木工程系, 中国 香港 999077
Progress of Diamond-like Carbon Films
CHEN Qing-yun1,2, SHI Kai-min2, SU Min-hua2, LYU Hui-yi1, LUO Yu1, ZENG Chen1
1. Key Subject Laboratory of National Defense for Radioactive Waste and Environmental Security, Southwest University of Science and Technology, Mianyang 621010, Sichuan, China;
2. Department of Civil Engineering, Faculty of Engineering, The University of Hong Kong, Hong Kong 999077, China
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摘要 类金刚石膜具有高硬度、高热导率、低摩擦因数、良好的耐磨性能和化学惰性等优异的物化性能,在热沉、微电子、抗核加固、生物和汽车工业等领域具有重大的应用前景,近年来吸引了众多研究和关注。文章综述了类金刚石膜的研究进展和膜的成核机理,展示了类金刚石的应用前景,为该材料的研究和工业化应用提供思路和参考。
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陈青云
施凯敏
苏敏华
吕会议
罗瑜
曾陈
关键词 类金刚石膜成膜机理结合力摩擦性能    
Abstract:Diamond-like carbon(DLC) films had many unique and outstanding properties such as high thermal conductivity, high hardness, excellent chemical inertness, low friction coefficients and wear coefficients. The properties and combinations were very promising for heat sink, micro-electromechanical devices, radiation hardening, biomedical devices, automotive industry and other technical applications, more research and a lot of attention were attracted in recent years. The research progress of diamond-like films and the nucleation mechanism of film were summarized, and application prospect of DLC films were demonstrated. The aim of this paper is to provide insights on the research trend of DLC films and the industry applications.
Key wordsdiamond-like carbon    deposition mechanism    adhesion    tribological property
收稿日期: 2015-02-27      出版日期: 2017-03-22
中图分类号:  O484  
通讯作者: 施凯敏(1972-),男,副教授,博士,从事专业:环境材料,联系地址:香港薄扶林道香港大学黄克竞楼630室(999077),E-mail:kshih@hku.hk     E-mail: kshih@hku.hk
引用本文:   
陈青云, 施凯敏, 苏敏华, 吕会议, 罗瑜, 曾陈. 类金刚石膜研究进展[J]. 材料工程, 2017, 45(3): 119-128.
CHEN Qing-yun, SHI Kai-min, SU Min-hua, LYU Hui-yi, LUO Yu, ZENG Chen. Progress of Diamond-like Carbon Films. Journal of Materials Engineering, 2017, 45(3): 119-128.
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http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2015.000229      或      http://jme.biam.ac.cn/CN/Y2017/V45/I3/119
[1] MAY P W. The new diamond age[J]. Sicence,2008,319(5869):1490-1491.
[2] ROBERTSON J. Diamond-like amorphous carbon[J]. Mater Sci Eng R,2002,37(4-6):129-281.
[3] 吕反修. CVD金刚石膜新兴研究方向及市场现状与趋势[J]. 金属热处理,2008,33(11):1-5. LV F X. New research directions in CVD diamond films and the present status and future trends in commercialization[J]. Heat Treat Metal,2008,33(11):1-5.
[4] ERDEMIR A C.Tribology of diamond-like carbon films:recent progress and future prospects[J]. J Phys D:Appl Phys,2006,39(18):R311.
[5] BEWILOGUA K, HOFMANN D.History of diamond-like carbon films:from first experiments to worldwide applications[J]. Surf Coat Tech,2014,242:214-225.
[6] 柳翠. 类金刚石碳膜制备工艺及掺杂性能研究[D]. 大连:大连理工大学,2005. LIU C. The deposition and doping technics of diamond-like carbon films[D].Dalian:Dalian University of Technology,2005.
[7] 赵海龙,刘正堂,田浩,等. 射频磁控溅射法制备类金刚石薄膜的研究[J]. 机械科学与技术,2007,26(10):1277-1280. ZHAO H L, LIU Z T, TIAN H, et al. Investigation on diamond-like carbon films prepared by RF magnetron reactive sputtering[J]. Mechn Sci Techn Aerosp Eng,2007,26(10):1277-1280.
[8] BUNDY F P, HALL H T, STRONG H M, et al. Man-made diamonds[J]. Nature,1955,176(4471):51-55.
[9] ZHAO X Z, ROY R, CHERIAN K A, et al. Hydrothermal growth of diamond in metal-C-H2O systems[J]. Nature,1997,385(6616):513-515.
[10] BURKHARD G, DAN K, TANABE Y, et al. Carbon phase transition by dynamic shock compression of a copper/graphite powder mixture[J]. Jpn J Appl Phys,1994,33(6B):L876-L879.
[11] ANGUS J C, HAYMAN C C. Low-pressure, metastable growth of diamond and "diamondlike" phases[J]. Science,1998,241(4868):913-921.
[12] ROY R, CHERIAN K A, CHENG J P, et al.New process for atm diamond synthesis:from metallic solutions[J]. Innov Mater Res,1996,1(1):65-87.
[13] GRUEN D M, LIU S, KRAUSS A R, et al. Buckyball microwave plasmas:fragmentation and diamond-film growth[J]. J Appl Phys,1994,75(3):1758-1763.
[14] REGUEIRO M N, MONCEAU P, HODEAU J L. Crushing C60 to diamond at room temperature[J]. Nature,1992,355(6357):237-239.
[15] DAULTON T L, OZIMA M. Radiation-induced diamond formation in uranium-rich carbonaceous materials[J]. Science,1996,271(5253):1260-1263.
[16] LI Y, QIAN Y, LIAO H. A Reduction-pyrolysis-catalysis synthesis of diamond[J]. Science,1998,281(5374):246-248.
[17] GOGOTSI Y, WELZ S, ERSOY D A, et al. Conversion of silicon carbide to crystalline diamond-structured carbon at ambient pressure[J]. Nature,2001,411(6835):283-287.
[18] LOU Z, CHEN Q, ZHANG Y, et al. Diamond formation by reduction of carbon dioxide at low temperatures[J]. J Am Chem Soc,2003,125(31):9302-9303.
[19] SCHMELLEMEIER H. Die beeinflussung von festen oberflächen durch eine ionisierte gasatmosphäre[J]. Exp Tech Phys, 1953, 1:4968.
[20] AISENBERG S, CHABOT R. Ion-beam deposition of thin films of diamondlike carbon[J]. J Appl Phys,1971,42(7):2953-2958.
[21] ARNOLDUSSEN T C, ROSSI E M.Materials for magnetic recording[J]. Ann Rev Mater Sci,1985,15:379-409.
[22] ZENG A, NETO V F, GRACI J J, et al. Diamond-like carbon films as electrochemical electrodes[J]. Diam Relat Mater,2014,43:12-22.
[23] ROBERTSON J. Diamond-like amorphous carbon[J]. Mater Sci Eng Rep,2002,37(4-6):129-281.
[24] PAN X D, MAYDELL E A, MILNE R H, et al.Diamond-like carbon films prepared by RF plasma deposition[J]. Vacuum, 1990,41(4-6):1360.
[25] WOJCIECHOWSKI K T, ZYBALA R, MANIA R, et al. DLC layers prepared by the PVD magnetron sputtering technique[J]. J Achiev Mater Manuf Engin,2009,37(2):726-729.
[26] PARK C, CHOI S G, JANG J, et al. Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique[J]. Surf Coat Tech,2013,231(25):131-134.
[27] PU J, WANG S, LIN C, et al. Characterization of boron-doped diamond-like carbon prepared by radio frequency sputtering[J]. Thin Solid Films,2010,519(1):2010.
[28] YAN X B, XU T, YANG S R, et al. Characterization of hydrogenated diamond-like carbon films electrochemically deposited on a silicon substrate[J]. J Phys D Appl Phys,2004,37(17):2416.
[29] WANG H, SHEN M R, NING Z Y, et al. Deposition of diamond-like carbon films by electrolysis of methanol solution[J]. Appl Phys Lett,1996,69(8):1074.
[30] WANG H, YOSHIMURA M.Electrodeposition of diamond-like carbon films in organic solvents using a thin wire anode[J]. Chem Phys Lett,2001,348(1-2):7-10.
[31] KAUTEK W, PENTZIEN S, CONRADI A, et al.Pulsed-laser deposition and boron-blending of diamond-like carbon (DLC) thin films[J]. Appl Surf Sci,1996,106:158-165.
[32] SATYANARAYANA B S, HART A, MILNE W I, et al.Field emission from tetrahedral amorphous carbon[J]. Appl Phys Lett,1998,7(2-5):656-659.
[33] HAS Z, MIRUTA S. Nuleation of allotropic carbon in an external electric field[J]. Thin Solid Films,1985,128(3-4):353-360.
[34] FREAMAN J H, TEMPLE W, GARD G A. The epitaxial synthesis of diamond by the deposition of low energy carbon ions[J]. Vacuum,1984,34(1-2):305-314.
[35] HE X M, HAKOVIRTA M, PETERS A M, et al.Fluorine and boron co-doped diamond-like carbon films deposited by pulsed glow discharge[J]. J Vac Sci Technol A,2002,20(3):638.
[36] HAYASHI N, OKI T. Diamond-like carbon coatings fabricated by the ball impact process[J]. Chem Eng J,2014,237:455-461.
[37] CHAN W C W, GASPARI F, ALLEN T, et al.Structural, optical, and electrical properties of doped hydrogenated diamond-like amorphous carbon films deposited using the dc saddle-field glow-discharge technique[J]. J Vac Sci Technol A,1998,16(2):889.
[38] XIAO J, JIANG A. Effect of radio frequency power on the structural and optical properties of nitrogen doping of fluorinated diamond-like carbon thin films[J]. J Phys D:Appl Phys,2008,41(22):225304.
[39] KIM Y T, CHO S M, CHOI W S, et al.Dependence of the bonding structure of DLC thin films on the deposition conditions of PECVD method[J]. Surf Coat Tech,2003,169-170:291-294.
[40] HELLGREN N, JOHANSSON M P, BROITMAN E, et al.Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering[J]. Phys Rev B, 1999, 59:5162-5169.
[41] AIJAZ A, SARAKINOS K, LUNDIN D, et al.A strategy for increased carbon ionization in magnetron sputtering discharges[J]. Diam Relat Mater,2012,23:1-4.
[42] FERRAI A C.Diamond-like carbon for magnetic storage disks[J]. Surf Coat Tech,2004,180-181:190-206.
[43] CASIRAGHI C, ROBERTSON J, FERRARI A C.Diamond-like carbon for data and beer storage[J]. Mater Today,2007,10:44-53.
[44] MYUNG H S, PARK Y S, LEE J W, et al.Structures and mechanical properties of diamond like carbon films prepared closed-field unbalanced magnetron sputtering[J]. Thin Solid Films,2005,475:303-307.
[45] PARK Y S, MYUNG H S, HAN J G, et al. Characterization of CN<em>x thin films prepared by close field unbalanced magnetron sputtering[J]. Thin Solid Films,2005,475:298-302.
[46] ROBERTSON J. Diamond like amorphous carbon[J]. Mater Sci Eng R,2002,37:129.
[47] WU Z, TIAN X, GUI G, et al. Microstructure and surface properties of chromium-doped diamond-like carbon thin films fabricated by high power pulsed magnetron sputtering[J]. Appl Surf Sci,2013,276:31-36.
[48] HUANG M, ZHANG X, KE P, et al. Graphite-like carbon films by high power impulse magnetron sputtering[J]. Appl Surf Sci,2013,283:321-326.
[49] SARAKINOS K, BRAUN A, ZILKENS C, et al. Exploring the potential high power impulse magnetron sputtering for growth of diamond-like carbon films[J]. Surf Coat Technol,2012,206:2706-2710.
[50] MAISSEL L I,GLANG R. Handbook of Thin Film Technology[M]. California:McGraw-Hill,1970.5-7.
[51] NAMBA Y. Attempt to grow diamond phase carbon film an organic solution[J]. J Vac Sci Technol A,1992,10(5):3368-3370.
[52] WANG H, SHEN M, NING Z, et al. Deposition of diamond-like carbon films by electrolysis of methanol solution[J]. Appl Phys Lett,1996,69:1074.
[53] WANG H, SHENG M R, NING Z Y, et al. Deposition of unbydrogenated diamond-like amorphous carbon films by electrolysis of organic solutions[J]. Thin Solid Films,1997,293(1-2):87-90.
[54] FU Q, JUI J T, CAO C B, et al. Electrodeposition of carbon films from various organic liquids[J]. Surf Coat Technol,2000,124(2-3):196-200.
[55] CAI K, GUO D, HUANG Y, et al. Evaluation of diamond-like carbon films deposited on conductive glass from organic liquids using pulsed current[J]. Surf Coat Technol,2000,130(2-3):266-273.
[56] WANG H, SHENG M R, NING Z Y, et al. Pulsed electrodeposition of diamond-like carbon films[J]. J Mater Res,1997,12:3102-3105.
[57] SREEJITH K, NUWAD J, PILLAI C G S. Low voltage electrodeposition of diamond like carbon[J]. Appl Surf Sci,2005,252(2):296-302.
[58] PANG H, WANG X, ZHANG G, et al. Characterization of diamond-like carbon films by SEM, XRD and Raman spectroscopy[J]. Appl Surf Sci,2010,256(21):6403-6407.
[59] BOURQUARD F, TITE T, LOIR A, et al. Control of the graphite femtosecond ablation plume kinetics by temporal laser pulse shaping:effects on pulsed laser deposition of diamond-like carbon[J]. J Phys Chem C,2014,118(8):4377-4385.
[60] ACSENTE T, IONITA E R, COLCEAG D, et al. Properties of composite a-C:H/metal layers deposited by combined RF PECVD/magnetron sputtering techniques[J]. Thin Solid films, 2011,519:4054-4058.
[61] HAYASHI N, OKI T. Diamond-like carbon coatings fabricated by the ball impact process[J]. Chem Eng J, 2014, 237:455-461.
[62] FERRARI A C, ROBERTSON J, PASTORELLI R, et al. Elastic constants of tetrahedral amorphous carbon films by surface Brillouin scattering[J]. Appl Phys Lett, 1999, 75(13):1893-1895.
[63] FERRARI A C. Diamond-like carbon for magnetic storage disks[J]. Surf Coat Tech,2004,180-181:190-206.
[64] SPENCER E G, SCHMIDT P H, JOY D C, et al. Ion-beam-deposited polycrystalline diamondlike films[J]. Appl Phys Lett, 1976,29(2):118.
[65] LIFSHITZ Y, KASI S R, RABALAIS J W, et al. Subplantation model for film growth from hyper thermal species[J]. Phys Rev B,1990,41:10468-10480.
[66] WEISSMANTEL C. Ion based growth of special films:techniques and mechanisms[J]. Thin Solid Films,1982,92(1-2):55-63.
[67] MOLLER W. Modeling of the sp3/sp2 ratio in ion beam and plasma-deposited carbon films[J]. Appl Phys Lett,1991,59(19):2391.
[68] DAVIS C A. A simple model for the formation of compressive stress in thin films by ion bombardment[J]. Thin Solid Films,1993,226(1):30-34.
[69] ROBERTSON J. Deposition mechanism of diamond-like carbon and cubic boron nitride[J]. Radiat Eff Defect S,1997,142(1-4):63-90.
[70] 王丽莉,万强,胡文军,等. 类金刚石薄膜sp2-sp3轨道杂化的第一性原理研究[J]. 分子科学学报,2009,25(5):316-321. WANG L L, WAN Q, HU W J, et al. First-principles studies of sp2-sp3 hybridized bonding in diamond-like films[J]. J Molec Sci,2009,25(5):316-321.
[71] TAKAI K, OGA M, SATO H, et al. Structure and electronic properties of a nongraphitic disordered carbon system and its heat-treatment effects[J]. Phys Rev B,2003,67:214202.
[72] LIAO X, ZHANG X, TAKAI K, et al. Electric field induced sp3-to-sp2 conversion and nonlinear electron transport in iron-doped diamond-like carbon thin film[J]. J Appl Phys,2010,107(1):013709-7.
[73] 林松盛,代明江,侯惠君,等. 掺钛类金刚石膜的微观结构研究[J]. 真空科学与技术学报,2007,27(5):418-421. LIN S S, DAI M J, HOU H J, et al. Microstructures of Ti-doped diamond-like carbon films[J].Chin J Vacu Sci Tech, 2007, 27(5):418-421.
[74] SAHOO S, PRADHAN S K, JEEVITHA M, et al. A study of diamond like carbon/chromium films deposited by microwave plasma activated chemical vapor deposition[J]. J Non-Cryst Solids,2014,386:14-18.
[75] ERDEMIR A, DONNET C. Tribology of diamond-like carbon films:recent progress and future prospects[J]. J Phys D:Appl Phys,2006,39(18):R311-R327.
[76] PEINER E, TIBREWALA A, BANDORF R, et al. Diamond-like carbon for MEMS[J]. J Micromech & Microeng,2007,17(7):83-90.
[77] MAHMUD K A H, VARMAN M, KALAM M A, et al. Tribological characteristics of amorphous hydrogenated (a-C:H) and tetrahedral (ta-C) diamond-like carbon coating at different test temperatures in the presence of commercial lubricating oil[J]. Surf Coat Tech, 2014,245:133-147.
[78] MEŠKINIS Š, VASILIAUSKAS A, ŠLAPIKAS K, et al. Bias effects on structure and piezoresistive properties of DLC:Ag thin films[J]. Surf Coat Tech,2014,255:84-89.
[79] MIKSOVSKY J, VOSS A, KOZAROVA R, et al. Cell adhesion and growth on ultrananocrystalline diamond and diamond-like carbon films after different surface modifications[J]. Appl Surf Sci,2014,297:95-102.
[80] GABRYELCZYK B, SZILVAY G R, LINDER M B. The structural basis for function in diamond-like carbon binding peptides[J]. Langmuir,2014,30(29):8789-8802.
[81] HSIEH J, CHUA D H C, TAY B K, et al. Monochromatic photoluminescence obtained from embedded ZnO nanodots in an ultrahard diamond-like carbon matrix[J]. Diam Relat Mater, 2008,17(2):167-170.
[82] 王雪敏,吴卫东,李盛印,等. 类金刚石膜在ICF研究中的潜在应用[J]. 激光与光电子学进展,2009,46(1):60-66. WANG X M, WU W D, LI S Y, et al. Potential applications of diamond-like carbon films in intertial confinement fusion[J]. Laser & Optoelectronics Progress,2009,46(1):60-66.
[83] AMENDT P, CERJAN C, HAMZA A, et al. Assessing the prospects for achieving double-shell ignition on the national ignition facility using vacuum hohlraums[J]. Phys Plasmas,2007,14:056312.
[84] BIENER J, MIRKARIMI P B, TRINGE J W, et al. Diamond ablators for inertial confinement fusion[J]. Fusion Sci Tech 2006,49:737-742.
[85] PAUL D R. Creating new types of carbon-based membranes[J]. Science,2012,335:413-414.
[86] KARAN S, SAMITSU S, PENG X, et al. Ultrafast viscous permeation of organic solvents through diamond-like carbon nanosheets[J]. Science,2012,335:444-446.
[87] WANG Z M, ZHANG J, HAN X, et al. Corrosion and salt scale resistance of multilayered diamond-like carbon film in CO2 saturated solutions[J]. Corros Sci,2014,86:261-267.
[88] NAKAYA M, SHIMIZU M, UEDONO A. Impact of the difference in power frequency on diamond-like carbon thin film coating over 3-dimensional objects[J]. Thin Solid Films,2014,564:45-50.
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