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材料工程  2017, Vol. 45 Issue (6): 31-35    DOI: 10.11868/j.issn.1001-4381.2015.000612
  研究论文 本期目录 | 过刊浏览 | 高级检索 |
钛合金表面Ti-TiN-Zr-ZrN多层膜制备及性能
林松盛1,2,3, 周克崧1,2,3, 代明江2,3, 石倩2,3, 胡芳2,3, 侯惠君2,3, 韦春贝2,3, 刘建武4
1 华南理工大学 材料科学与工程学院, 广州 510641;
2 广东省 新材料研究所 现代材料表面工程技术国家工程实验室, 广州 510650;
3 广东省新材料研究所 广东省现代表面工程技术重点实验室, 广州 510650;
4 中国航发 湖南动力机械研究所, 湖南 株洲 412002
Preparation and Properties of Ti-TiN-Zr-ZrN Multilayer Films on Titanium Alloy Surface
LIN Song-sheng1,2,3, ZHOU Ke-song1,2,3, DAI Ming-jiang2,3, SHI Qian2,3, HU Fang2,3, HOU Hui-jun2,3, WEI Chun-bei2,3, LIU Jian-wu4
1 School of Materials Science and Engineering, South China University of Technology, Guangzhou 510641, China;
2 National Engineering Lab for Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510650, China;
3 The Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510650, China;
4 Hunan Aviation Power Plant Research Institute, Aero Engine Corporation of China, Zhuzhou 412002, Hunan, China
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摘要 采用多靶位真空阴极电弧沉积技术,在TC11钛合金表面制备24周期的Ti-TiN-Zr-ZrN软硬交替多元多层膜。用扫描电镜、X射线衍射仪、显微硬度计、结合力划痕仪、球-盘摩擦磨损试验仪、砂粒冲刷试验仪和3D表面形貌仪,研究多层膜的表面及截面形貌、相结构、厚度、硬度、膜/基结合力、摩擦磨损性能和抗砂粒冲蚀性能。结果表明:所制备Ti-TiN-Zr-ZrN多层膜厚度约为5.8μm,维氏显微硬度为28.10GPa,膜基结合力为56N;TC11钛合金表面镀多层膜后耐磨性提高了一个数量级,体积磨损率由7.06×10-13m3·N-1·m-1降低到3.03×10-14m3·N-1·m-1;多层膜软硬层交替的结构,受砂粒冲蚀时裂纹扩展至金属软层时应力的缓冲而出现偏转,对TC11钛合金有良好的抗砂粒冲蚀保护作用。
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林松盛
周克崧
代明江
石倩
胡芳
侯惠君
韦春贝
刘建武
关键词 Ti-TiN-Zr-ZrN多层膜钛合金冲蚀真空阴极电弧沉积    
Abstract:24 cycles Ti-TiN-Zr-ZrN soft-hard alternating multilayer film was deposited on TC11 titanium alloy by vacuum cathodic arc deposition method. The structure and performance of the multilayer film, especially wear and sand erosion resistance were investigated by various analytical methods including pin on disc wear tester, sand erosion tester, 3D surface topography instrument, scanning electron microscopy (SEM), X-ray diffraction(XRD), micro-hardness tester and scratch adhesion tester. The results indicate that the Vickers-hardness of the multilayer film with thickness of 5.8μm can reach up to 28.10GPa. The adhesive strength of these coatings can be as high as 56N. Wear rate of the multilayer coated alloy is one order of magnitude smaller than bare one, which decreased from 7.06×10-13 m3·N-1·m-1 to 3.03×10-14m3·N-1·m-1. Multilayer films can play the role in hindering the extension of cracks, and thus sand erosion properties of the TC11 titanium alloy substrates are improved.
Key wordsTi-TiN-Zr-ZrN multilayer film    titanium alloy    erosion    vacuum cathodic arc deposition
收稿日期: 2015-05-15      出版日期: 2017-06-20
中图分类号:  TG174.444  
通讯作者: 林松盛(1973-),男,教授,博士,从事专业:气相沉积薄膜材料,联系地址:广州市天河区长兴路363号大院广东省新材料研究所二楼真空镀膜研究室(510650),E-mail:lss7698@126.com     E-mail: lss7698@126.com
引用本文:   
林松盛, 周克崧, 代明江, 石倩, 胡芳, 侯惠君, 韦春贝, 刘建武. 钛合金表面Ti-TiN-Zr-ZrN多层膜制备及性能[J]. 材料工程, 2017, 45(6): 31-35.
LIN Song-sheng, ZHOU Ke-song, DAI Ming-jiang, SHI Qian, HU Fang, HOU Hui-jun, WEI Chun-bei, LIU Jian-wu. Preparation and Properties of Ti-TiN-Zr-ZrN Multilayer Films on Titanium Alloy Surface. Journal of Materials Engineering, 2017, 45(6): 31-35.
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http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2015.000612      或      http://jme.biam.ac.cn/CN/Y2017/V45/I6/31
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