热丝法化学气相沉积金刚石系统温度分布与薄膜生长关系研究
戚学贵, 陈则韶, 王冠中
Study of the Relationship between Temperature Field and Diamond Film Growth in Hot-filament CVD Reactors
QI Xue-gui, CHEN Ze-shao, WANG Guan-zhong
材料工程 . 2001, (11): 31 -34,16 .