类金刚石膜研究进展

陈青云, 施凯敏, 苏敏华, 吕会议, 罗瑜, 曾陈

Progress of Diamond-like Carbon Films

Qing-yun CHEN, Kai-min SHI, Min-hua SU, Hui-yi LYU, Yu LUO, Chen ZENG

材料工程 . 2017, (3): 119 -128 . DOI: 10.11868/j.issn.1001-4381.2015.000229