Effects of Hydroxyl Treatment on Atomic Resistance Property of Hexagonal Boron Nitride Film

Yu ZHANG, Feng HUANG, Jin-rui MA, Qiang LIU, Yu SUN

Journal of Materials Engineering ›› 2018, Vol. 46 ›› Issue (7) : 61-67.

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Journal of Materials Engineering ›› 2018, Vol. 46 ›› Issue (7) : 61-67. DOI: 10.11868/j.issn.1001-4381.2017.001154
RESEARCH ARTICLE

Effects of Hydroxyl Treatment on Atomic Resistance Property of Hexagonal Boron Nitride Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 46(7): 61-67 https://doi.org/10.11868/j.issn.1001-4381.2017.001154

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