Estimation and analysis of probability of PVD film sensor crack detection

Kai LIU, Rong-hong CUI, Bo HOU, Yu-ting HE, Huan NIU

Journal of Materials Engineering ›› 2019, Vol. 47 ›› Issue (9) : 160-166.

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Journal of Materials Engineering ›› 2019, Vol. 47 ›› Issue (9) : 160-166. DOI: 10.11868/j.issn.1001-4381.2018.000781
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Estimation and analysis of probability of PVD film sensor crack detection

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 47(9): 160-166 https://doi.org/10.11868/j.issn.1001-4381.2018.000781

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