Structure and transparent conductive properties of F-doped ZnO(FZO) thin films prepared by reactive magnetron sputtering

Bai-lin ZHU, Si-long ZHENG, Ting XIE, Jun WU

Journal of Materials Engineering ›› 2021, Vol. 49 ›› Issue (11) : 98-104.

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Journal of Materials Engineering ›› 2021, Vol. 49 ›› Issue (11) : 98-104. DOI: 10.11868/j.issn.1001-4381.2021.000132
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Structure and transparent conductive properties of F-doped ZnO(FZO) thin films prepared by reactive magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 49(11): 98-104 https://doi.org/10.11868/j.issn.1001-4381.2021.000132

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