Preparation and properties of 3D cross-finger electrode symmetrical micro capacitor based on PI

Weiwei JI, Peng GAO, Baocheng LIU, Zhankun MENG, He WANG, Xingjiang LIU

Journal of Materials Engineering ›› 2023, Vol. 51 ›› Issue (11) : 205-213.

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Journal of Materials Engineering ›› 2023, Vol. 51 ›› Issue (11) : 205-213. DOI: 10.11868/j.issn.1001-4381.2023.000018
RESEARCH ARTICLE

Preparation and properties of 3D cross-finger electrode symmetrical micro capacitor based on PI

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 51(11): 205-213 https://doi.org/10.11868/j.issn.1001-4381.2023.000018

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