Mechanism of action and process for graphene oxide in electrochemical mechanical polishing of silicon carbide

PENG Chao, REN Ronghao, WANG Zirui, WANG Yongguang, HUANG Dongmei, ZHU Rui, CHENG Feng

Journal of Materials Engineering ›› 2025, Vol. 53 ›› Issue (8) : 185-192.

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Journal of Materials Engineering ›› 2025, Vol. 53 ›› Issue (8) : 185-192. DOI: 10.11868/j.issn.1001-4381.2023.000441

Mechanism of action and process for graphene oxide in electrochemical mechanical polishing of silicon carbide

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 53(8): 185-192 https://doi.org/10.11868/j.issn.1001-4381.2023.000441

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