Integration technique of Pt/PtRh high- temperature thin film thermocouple sensors fabricated via magnetron sputtering

ZHANG Wenqi, SHEN Tong, WANG Linbin, ZHAO Weiyun, DENG Yuan

Journal of Materials Engineering ›› 2024, Vol. 52 ›› Issue (9) : 27-33.

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Journal of Materials Engineering ›› 2024, Vol. 52 ›› Issue (9) : 27-33. DOI: 10.11868/j.issn.1001-4381.2023.000496
AERO ENGIN SENSOR MATERIALS TECHNOLOGY COLUMN

Integration technique of Pt/PtRh high- temperature thin film thermocouple sensors fabricated via magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 52(9): 27-33 https://doi.org/10.11868/j.issn.1001-4381.2023.000496

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