Preparation and properties of HfO2 coatings by chemical vapor deposition

Ruipeng HE, Li'an ZHU, Zhen WANG, Yicong YE, Shun LI, Yu TANG, Shuxin BAI

Journal of Materials Engineering ›› 2024, Vol. 52 ›› Issue (5) : 67-75.

PDF(4130 KB)
  • Ei，ESCI收录期刊
  • 中国科学引文数据库(CSCD)核心期刊
  • 中文核心期刊
  • 文摘与引文数据库(Scopus)
  • 剑桥科学文摘(CSA)
PDF(4130 KB)
Journal of Materials Engineering ›› 2024, Vol. 52 ›› Issue (5) : 67-75. DOI: 10.11868/j.issn.1001-4381.2023.000561
Research Article

Preparation and properties of HfO2 coatings by chemical vapor deposition

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 52(5): 67-75 https://doi.org/10.11868/j.issn.1001-4381.2023.000561

References

List( Publishing order | Descend order by publishing year | Descend order by cited within ) Chart analysis

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(4130 KB)

Accesses

Citation

Detail
Sections
Recommended

/

〈 〉