Effect of power on microstructure and properties of Si-DLC films fabricated by pulsed direct current magnetron sputtering
WANG Shaohui, CHAI Liqiang, HU Yong, WANG Peng, LI Yong
Journal of Materials Engineering . 2026, (10): 231 -240 .  DOI: 10.11868/j.issn.1001-4381.2024.000539