Preparation and relevant properties of amorphous AlBN dielectric films
Feng-feng LIU, Yu-xiong LI, Zhan-peng SUI, Yong CAI, Yong-hong ZHANG, Chun-ping JIANG
Journal of Materials Engineering . 2020, (6): 112 -117 .  DOI: 10.11868/j.issn.1001-4381.2019.000323