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材料工程  2014, Vol. 0 Issue (12): 34-38    DOI: 10.11868/j.issn.1001-4381.2014.12.006
  材料与工艺 本期目录 | 过刊浏览 | 高级检索 |
溅射法制备TiO2薄膜的耐腐蚀性
王军1,2, 刘莹1, 丁红燕3
1. 南昌大学 机电工程学院, 南昌 330031;
2. 江西科技师范大学 江西省材料表面工程重点实验室, 南昌 330031;
3. 江苏省介入 医疗器械研究重点实验室, 江苏 淮安 223003
Corrosion Resistance Behavior of TiO2 Thin Films Prepared by Sputtering
WANG Jun1,2, LIU Ying1, DING Hong-yan3
1. School of Mechanical and Electrical Engineering, Nanchang University, Nanchang 330031, China;
2. Jiangxi Key Laboratory of Surface Engineering, Jiangxi Science and Technology Normal University, Nanchang 330031, China;
3. Jiangsu Provincial Key Laboratory for Interventional Medical Devices, Huai'an 223003, Jiangsu, China
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摘要 采用溅射法在石英和316L不锈钢衬底上制备TiO2薄膜.采用X射线衍射仪(XRD)、扫描电镜(SEM)、原子力显微镜(AFM)观察薄膜的微观结构和表面形貌.结果表明:沉积后的TiO2薄膜表面均匀、致密,为锐钛矿结构.600℃退火后,薄膜中有金红石相生成.基于透射谱,计算得到的薄膜光学带隙在3.2eV左右.在PBS模拟体液中,测试材料的动电位极化曲线.结果显示,沉积TiO2薄膜后,材料的耐腐蚀性得到改善.退火后,TiO2薄膜的自腐蚀电位正向移动94mV,自腐蚀电流最小,为4.828μA·cm-2.
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王军
刘莹
丁红燕
关键词 TiO2薄膜溅射316L不锈钢微观结构耐腐蚀性    
Abstract:TiO2 thin films were prepared by sputtering on 316L stainless steel and fused quartzes. The microstructure and surface morphology of the films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atom force microscopy (AFM). The results indicate that the as-deposited TiO2 thin film has uniform and crack-free surface with anatase structure. The rutile phase is formed in the film annealed at 600℃. The calculated optical band-gap of the films is around 3.2eV based on transmission spectra. The potentiodynamic polarization is tested in PBS simulated body solution. It shows that the corrosion resistance of 316L stainless steel is improved with TiO2 thin films. The corrosion potential shifts positively +94mV for the annealed TiO2 thin film. While, it has the lowest corrosion current density(4.828μA·cm-2).
Key wordsTiO2 thin film    sputtering    316L stainless steel    microstructure    corrosion resistance
收稿日期: 2013-06-09      出版日期: 2014-12-20
1:  TG174.2  
  R318.08  
基金资助:国家自然科学基金资助项目(51165031)
通讯作者: 刘莹(1957-),女,教授,博士生导师,研究方向:表面、界面工程与摩擦学,联系地址:江西省南昌市红谷滩新区学府大道999 号南昌大学机电工程学院(330031)     E-mail: lying@ncu.edu.cn
引用本文:   
王军, 刘莹, 丁红燕. 溅射法制备TiO2薄膜的耐腐蚀性[J]. 材料工程, 2014, 0(12): 34-38.
WANG Jun, LIU Ying, DING Hong-yan. Corrosion Resistance Behavior of TiO2 Thin Films Prepared by Sputtering. Journal of Materials Engineering, 2014, 0(12): 34-38.
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http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2014.12.006      或      http://jme.biam.ac.cn/CN/Y2014/V0/I12/34
[1] DING M H, ZHANG H S, ZHANG C, et al. Characterization of ZrC coatings deposited on biomedical 316L stainless steel by magnetron sputtering method[J]. Surface and Coatings Technology, 2013,224:34-41.
[2] MUTHUKUMARAN V, SELLADURAI V, NANDHAKUMAR S, et al. Experimental investigation on corrosion and hardness of ion implanted AISI 316L stainless steel[J]. Materials and Design,2010,31(6):2813-2817.
[3] BALAMURUGAN A, KANNAN S, RAJESWARI S. Evaluation of TiO2 coatings obtained using the sol-gel technique on surgical grade type 316L stainless steel in simulated body fluid[J].Materials Letters,2005,59(24-25):3138-3143.
[4] 刘成龙,杨大智,赵红,316L不锈钢表面液相沉积TiO2薄膜的耐腐蚀性研究[J].功能材料,2003,34(5):600-602.LIU C L, YANG D Z, ZHAO H. Corrosion resistance behavior of TiO2 thin films prepared by LPD on 316L SS[J]. Journal of Functional Materials,2003,34(5):600-602.
[5] CHERAGHI H, SHAHMIRI M, SADEGHIAN Z. Corrosion behavior of TiO2-NiO nanocomposite thin film on AISI 316L stainless steel prepared by sol-gel method[J]. Thin Solid Films,2012,522(1):289-296.
[6] ZHENG Y F, LIU D, LIU X L, et al. Enhanced corrosion resistance of Zr coating on biomedical TiNi alloy prepared by plasma immersion ion implantation and deposition[J]. Applied Surface Science,2008,255(2):512-514.
[7] MACIONCZYK F, GEROLD B, THULL R. Properties of arc plasma deposited TiCN/ZrCN superlattice coatings[J]. Surface and Coatings Technology,2005,200(1-4):1084-1087.
[8] EL-HOSSARY F M, NEGM N Z, EL-RAHMAN A M ABD, et al. Duplex treatment of AISI 304 austenitic stainless steel using RF nitriding and DC reactive magnetron sputtering of titanium [J]. Surface and Coating Technology,2008,202(8):1392-1400.
[9] XIN Yun-chang, LIU Cheng-long, HUO Kai-fu, et al. Corrosion behavior of ZrN/Zr coated biomedical AZ91 magnesium alloy[J]. Surface and Coatings Technology,2009,203(27-28):2554-2557.
[10] LENG Y X, SUN H, YANG P, et al. Biomedical properties of tantalum nitride films synthesized by reactive magnetron sputtering[J]. Thin Solid Films,2001,398-399(11):471-475.
[11] NAGARAJAN S, RAJENDRAN N. Sol-gel derived porous zirconium dioxide coated on 316L SS for orthopedic applications[J]. Journal of Sol-Gel Science and Technology,2009,52(2):188-196.
[12] HUANG N, YANG P, LENG Y X, et al. Hemocompatibility of titanium oxide films[J]. Biomaterials,2003,24(13):2177-2187.
[13] XIE D, WAN G J, MAITZ M F, et al. Deformation and corrosion behaviors of Ti-O film deposited 316L stainless steel by plasma immersion ion implantation and deposition[J]. Surface and Coatings Technology,2013,214(1):117-123.
[14] BARATI N, SANI M A F, GHASEMI H, et al. Preparation of uniform TiO2 nanostructure film on 316L stainless steel by sol-gel dip coating[J]. Applied Surface Science,2009,255(20): 8328-8333.
[15] FU T, WEN C S, LU J, et al. Sol-gel derived TiO2 coating on plasma nitrided 316L stainless steel [J]. Vacuum,2012,86(9): 1402-1407.
[16] NAM J K, YOUNG H L, SANG H I, et al. Optical and structure properties of Fe-TiO2 thin films prepared by sol-gel dip coating[J]. Thin Solid Films,2010,518(Suppl):156-160.
[17] MARDARE D, TASCA M, DELIBAS M, et al. On the structural properties and optical transmittance of TiO2 r.f. sputtered thin films[J]. Applied Surface Science,2000,156(1-4):200-206.
[18] MOTTO N F. Conduction in Non-crystalline Materials[M]. Oxford:Clarendon Press,1987.
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