Corrosion Resistance Behavior of TiO2 Thin Films Prepared by Sputtering
WANG Jun1,2, LIU Ying1, DING Hong-yan3
1. School of Mechanical and Electrical Engineering, Nanchang University, Nanchang 330031, China;
2. Jiangxi Key Laboratory of Surface Engineering, Jiangxi Science and Technology Normal University, Nanchang 330031, China;
3. Jiangsu Provincial Key Laboratory for Interventional Medical Devices, Huai'an 223003, Jiangsu, China
Abstract：TiO2 thin films were prepared by sputtering on 316L stainless steel and fused quartzes. The microstructure and surface morphology of the films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atom force microscopy (AFM). The results indicate that the as-deposited TiO2 thin film has uniform and crack-free surface with anatase structure. The rutile phase is formed in the film annealed at 600℃. The calculated optical band-gap of the films is around 3.2eV based on transmission spectra. The potentiodynamic polarization is tested in PBS simulated body solution. It shows that the corrosion resistance of 316L stainless steel is improved with TiO2 thin films. The corrosion potential shifts positively +94mV for the annealed TiO2 thin film. While, it has the lowest corrosion current density(4.828μA·cm-2).
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