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材料工程  2016, Vol. 44 Issue (8): 40-45    DOI: 10.11868/j.issn.1001-4381.2016.08.007
  材料与工艺 本期目录 | 过刊浏览 | 高级检索 |
Mo离子注入对纯铜表面纳米层稳定性的影响
郗旸1, 张淇萱1, 李才巨1, 谭军1, 朱心昆1, 王刚2, 易健宏1
1. 昆明理工大学 材料科学与工程学院, 昆明 650093;
2. 上海大学 微观结构实验室, 上海 200444
Effect of Mo Ion Implantation on Stability of Nanocrystalline Copper Surface Layers
XI Yang1, ZHANG Qi-xuan1, LI Cai-ju1, TAN Jun1, ZHU Xin-kun1, WANG Gang2, YI Jian-hong1
1. Faculty of Materials Science and Engineering, Kunming University of Science and Technology, Kunming 650093, China;
2. Laboratory for Microstructures, Shanghai University, Shanghai 200444, China
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摘要 采用表面机械研磨处理(SMAT)对纯铜进行表面改性,通过金属蒸汽真空弧离子注入技术在纳米表层注入Mo离子。利用光学显微镜(OM)、X射线衍射分析仪(XRD)和扫描电镜(SEM)观察SMAT处理效果,表面存在纳米层和变形层,通过原子力显微镜(AFM)表征纳米层的晶粒尺寸。结果表明:晶粒尺寸得到了显著的抑制,表面纳米层的晶粒在退火后长大到163nm,而注入了Mo离子的只长大到72nm。此外,SMAT并离子注入后材料表面的硬度仅达到SMAT试样的3.5倍,是纯Cu基体硬度的7倍左右。Mo离子的分散和由SMAT及离子注入引入晶体缺陷的反应促使了这些优化现象的产生。
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郗旸
张淇萱
李才巨
谭军
朱心昆
王刚
易健宏
关键词 表面机械研磨处理离子注入表面纳米层微观结构硬度    
Abstract:The surface of pure copper was modified using the surface mechanical attrition treatment (SMAT) method, and molybdenum ions were implanted in the nanosurface using a metal vapor vacuum arc (MEVVA). The results of the SMAT were observed by optical microscopy (OM), X-ray diffraction (XRD) and scanning electron microscopy (SEM). An obvious nanocrystalline layer and a deformation region exist on the surface. The size of the nanocrystalline layer was characterized using atomic force microscopy (AFM). The results indicate remarkable suppression on grain size, the nanocrystalline layer grows to 163nm after annealing and reduces to only 72nm due to the Mo ion implantation. In addition, the hardness of the topmost surface of the material is 3.5 times that of the SMATed copper, which is about 7 times of the value of the matrix. The above improvements most likely result from the dispersion of the Mo ions and the reactions of the crystal defects due to the SMAT and ion implantation.
Key wordssurface mechanical attrition treatment    ion implantation    nanocrystalline surface layer    microstructure    hardness
收稿日期: 2015-08-16      出版日期: 2016-08-23
中图分类号:  TG146.1  
  TG113  
通讯作者: 李才巨(1977-),男,副教授,博士,主要从事金属纳米材料制备工艺及理论研究,联系地址:云南省昆明市学府路昆明理工大学莲华校区材料科学与工程学院主楼810室(650093),lcj@kmust.edu.cn     E-mail: lcj@kmust.edu.cn
引用本文:   
郗旸, 张淇萱, 李才巨, 谭军, 朱心昆, 王刚, 易健宏. Mo离子注入对纯铜表面纳米层稳定性的影响[J]. 材料工程, 2016, 44(8): 40-45.
XI Yang, ZHANG Qi-xuan, LI Cai-ju, TAN Jun, ZHU Xin-kun, WANG Gang, YI Jian-hong. Effect of Mo Ion Implantation on Stability of Nanocrystalline Copper Surface Layers. Journal of Materials Engineering, 2016, 44(8): 40-45.
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http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2016.08.007      或      http://jme.biam.ac.cn/CN/Y2016/V44/I8/40
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