Fabrication and piezoresistance of high temperature ITO thin film strain gauge
YANG Shen-yong1, ZHANG Cong-chun1, YANG Zhuo-qing1, LI Hong-fang1, YAO Jin-yuan1, HUANG Man-guo2, WANG Hong1, DING Gui-fu1
1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China;
2. AVIC Beijing Changcheng Aeronautical Measurement and Control Technology Research Institute, Beijing 101111, China
Abstract：High temperature thin film strain gauges are widely used in the strain measurement of extreme conditions, especially in the high temperature components. ITO thin film strain gauges can generally be applied to the strain measurements above 1000℃. ITO high temperature thin film strain gauge was fabricated on the ceramic substrate using magnetron sputtering, and then was thermal treated at high temperature in pure N2 atmosphere, with the purpose of studying its microstructure, XPS, temperature resistance characteristics and piezoresistive response. The results show that the temperature coefficient of resistance (TCR) of ITO thin film strain gauge can stabilize at -750×10-6℃-1. In addition, ITO thin film strain gauge is loaded at 1200℃, and the results show that the drift rate is 0.0018 h-1 and the strain factor is 16. Stable TCR and low drift rate of ITO thin film strain gauge provide the possibility for its application in the strain measurement of the hot end components.
杨伸勇, 张丛春, 杨卓青, 李红芳, 姚锦元, 黄漫国, 汪红, 丁桂甫. 高温ITO薄膜应变计制备及压阻性能[J]. 材料工程, 2020, 48(4): 145-150.
YANG Shen-yong, ZHANG Cong-chun, YANG Zhuo-qing, LI Hong-fang, YAO Jin-yuan, HUANG Man-guo, WANG Hong, DING Gui-fu. Fabrication and piezoresistance of high temperature ITO thin film strain gauge. Journal of Materials Engineering, 2020, 48(4): 145-150.
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