基体表面粗糙度对MoS<sub>2</sub>/Ti薄膜摩擦磨损性能的影响

doi:10.11868/j.issn.1001-4381.2021.000047

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摘要

为揭示基体表面粗糙度对MoS₂/Ti固体润滑薄膜摩擦磨损性能的影响规律，并探究其摩擦磨损机理，采用磁控溅射方法，在不同表面粗糙度的轴承钢基体上沉积MoS₂/Ti薄膜。通过划痕测试仪、X射线衍射仪、场发射扫描电子显微镜和粗糙度轮廓仪，分别评价MoS₂/Ti薄膜的膜基结合力、物相成分、表面微观形貌以及表面粗糙度，并采用球-盘摩擦磨损实验研究干摩擦、固体-油复合润滑和固体-脂复合润滑条件下，MoS₂/Ti薄膜的摩擦磨损性能。结果表明：随着基体表面粗糙度的增加，MoS₂/Ti薄膜的表面粗糙度逐渐增加；薄膜中(002)_MoS₂和(100)_MoS₂衍射峰的强度先减弱后增加；薄膜与基体的结合性能降低。当基体表面粗糙度为0.01 μm时，干摩擦条件下MoS₂/Ti薄膜具有良好的润滑特性，平均摩擦因数为0.101，磨痕浅且小；随基体粗糙度的升高，样品的平均摩擦因数和磨损率均是先增大后减小，薄膜的主要磨损机制由磨粒磨损转变为屑片形成和破碎。当基体粗糙度较大时(R_a=0.26 μm)，分子间相互作用的影响大于机械啮合作用。采用固体-油复合润滑，高基体粗糙度的薄膜磨损表面不再出现片层剥落现象，磨痕较浅，平均摩擦因数最高可减小19%。固体-脂复合润滑条件下，样品摩擦磨损性能较差，基体粗糙度对摩擦因数的影响不显著。

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	陈爽
	韩雪艳
	安帅帅
	王勇杰
	李仕华

关键词 ：基体表面粗糙度, MoS₂/Ti薄膜, 干摩擦, 复合润滑, 阴影效应, 磨损机制

Abstract：

The effect of the substrate surface roughness on tribological properties of MoS₂/Ti films, and the friction and wear mechanism was studied. MoS₂/Ti films were deposited on bearing steel with different surface roughness by magnetron sputtering. The adhesion strength between the film and substrate, phase composition, surface morphology and surface roughness of MoS₂/Ti films were obtained respectively by scratch tester, X-ray diffractometer(XRD), scanning electron microscope (SEM) and roughness profiler. And the tribological properties of MoS₂/Ti films under dry friction, solid-oil composite lubrication and solid-grease composite lubrication were studied by a ball-on-disk tribometer. The results show that with the increase of the substrate surface roughness, the surface roughness of MoS₂/Ti films increases, the intensity of (002)_MoS₂ and (100)_MoS₂ diffraction peaks first decreases and then increases, and the adhesion strength between the film and substrate decreases. When the surface roughness of the substrate is 0.01 μm, the MoS₂/Ti films have good lubrication characteristics under dry friction condition. The average friction coefficient is 0.101, and the wear scar is shallow and small. With the increase of substrate roughness, the average friction coefficient and the wear rate of the samples increase first and then decrease. Meanwhile, the main wear mechanism of the film changes from abrasive wear to chip formation and fragmentation. And the effect of intermolecular interaction is greater than that of mechanical engagement, when the substrate roughness of the samples is large (R_a=0.26 μm). Under the condition of solid-oil composite lubrication, there is no fragmentation phenomenon on the worn surface with large substrate roughness. The wear scar is shallow, and the average friction coefficient is reduced by about 19%. Under the condition of solid-grease composite lubrication, the tribological properties of the samples are poor, and the effect of the substrate surface roughness on the friction coefficient is not significant.

Key words： surface roughness of substrate MoS₂/Ti film dry friction composite lubrication shadow effect wear mechanism

收稿日期: 2021-01-18 出版日期: 2022-08-16

中图分类号:

TG115.5⁺8

基金资助:国家自然科学基金项目(51775475)

通讯作者: 李仕华 E-mail: shli@ysu.edu.cn

作者简介: 李仕华(1966—)，男，教授，博士，研究方向为并联机器人技术及动态润滑理论，联系地址：河北省秦皇岛市河北大街西段438号燕山大学机械工程学院(066004)，E-mail: shli@ysu.edu.cn

引用本文:

陈爽, 韩雪艳, 安帅帅, 王勇杰, 李仕华. 基体表面粗糙度对MoS₂/Ti薄膜摩擦磨损性能的影响[J]. 材料工程, 2022, 50(8): 169-177.
Shuang CHEN, Xueyan HAN, Shuaishuai AN, Yongjie WANG, Shihua LI. Effect of substrate surface roughness on friction and wear properties of MoS₂/Ti films. Journal of Materials Engineering, 2022, 50(8): 169-177.

链接本文:

http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2021.000047 或 http://jme.biam.ac.cn/CN/Y2022/V50/I8/169

Fig.1 基体样品的表面粗糙度曲线
(a)R_a=0.01 μm; (b)R_a=0.06 μm; (c)R_a=0.11 μm; (d)R_a=0.26 μm

Fig.2 不同基体表面粗糙度MoS₂/Ti薄膜的SEM照片
(a)R_a=0.01 μm; (b)R_a=0.06 μm; (c)R_a=0.11 μm; (d)R_a=0.26 μm

Fig.3 MoS₂/Ti薄膜的XRD谱图

Fig.4 基体表面粗糙度的阴影效应

Fig.5 干摩擦条件下MoS₂/Ti薄膜的摩擦因数

Fig.6 干摩擦条件下MoS₂/Ti薄膜的磨痕形貌
(a)R_a=0.01 μm; (b)R_a=0.06 μm; (c)R_a=0.11 μm; (d)R_a=0.26 μm

Fig.7 干摩擦条件下MoS₂/Ti薄膜磨痕的二维轮廓曲线
(a)R_a=0.01 μm; (b)R_a=0.06 μm; (c)R_a=0.11 μm; (d)R_a=0.26 μm

Fig.8 干摩擦条件下MoS₂/Ti薄膜的平均磨损率

Fig.9 复合润滑条件下MoS₂/Ti薄膜的摩擦因数
(a)固体-油润滑；(b)固体-脂润滑

Fig.10 油润滑条件下MoS₂/Ti薄膜的磨痕形貌
(a)R_a=0.01 μm; (b)R_a=0.06 μm; (c)R_a=0.11 μm; (d)R_a=0.26 μm

Fig.11 脂润滑条件下MoS₂/Ti薄膜的磨痕形貌
(a)R_a=0.01 μm; (b)R_a=0.06 μm; (c)R_a=0.11 μm; (d)R_a=0.26 μm

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