Abstract：Heat and mass transfer affect growth rate and properties of diamond films in hot filament chemical vapor deposition reactors. Thermal transfer in three ways(conduction, convection and radiation) was analyzed and the temperature fields were also numerically calculated in this paper. Conduction is the dominant mechanism in gas-phase thermal transfer, while the temperature field on the substrate surface is determined mainly by radiation from the filament. The growth rate and microstructure of the diamond film prepared by HFCVD method is related to the temperature field on the substrate surface Large-area temperature field of high uniformity, which benefits to the growth of diamond film in large scale, can be obtained by using multi-filaments.
戚学贵, 陈则韶, 王冠中. 热丝法化学气相沉积金刚石系统温度分布与薄膜生长关系研究[J]. 材料工程, 2001, 0(11): 31-34,16.
QI Xue-gui, CHEN Ze-shao, WANG Guan-zhong. Study of the Relationship between Temperature Field and Diamond Film Growth in Hot-filament CVD Reactors. Journal of Materials Engineering, 2001, 0(11): 31-34,16.
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